| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for representing a depth decomposition image regarding a specimen while utilizing a computer processor.SOLUTION: In a scanning transmission microscope, a surface of a specimen S is scanned by a charged particle beam B with which the specimen is irradiated, output of a detector is recorded as a function of a scan position and when acquiring a scan image I by a transmission electron beam, a value Pof a variable beam parameter P is selected. An associated scan image Iis acquired and after a measurement aggregate M={(I,P)} is collected, a depth decomposition image regarding the specimen S is calculated and then spatially decomposed by automatically performing inverse superposition and integration on the measurement aggregate by a computer. The variable beam parameter P is a focal position, and the scan image I is a vector field image that is formed by generating and merging vector outputs from the detector at the scan positions by means of the detector including a plurality of detection segments.SELECTED DRAWING: Figure 1 |
