发明名称 CONDUCTOR PRODUCT LIFE INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To make it possible to accurately inspect electric conductor life by controlling the electric conductor life metal wiring life and the like, without heating.SOLUTION: An electric field is applied to an evaluation part 11 in test wiring 10, and an inspection current is flowed in such the state. Accordingly, electron is attracted to a part facing first and second electric field application wiring 20 and 30 of the evaluation part 11 to be concentrated, and the part having the electron concentrated becomes a current path, which in turn an effective wiring width becomes small. Thus, disconnection life can be measured by shortening the disconnection life. Accordingly, wiring life can be controlled without heating, and the wiring life can be accurately inspected.SELECTED DRAWING: Figure 1
申请公布号 JP2016206144(A) 申请公布日期 2016.12.08
申请号 JP20150091637 申请日期 2015.04.28
申请人 DENSO CORP 发明人 ASHIDA YOICHI;NAKAYAMA YOSHIAKI;NAKANO TAKASHI;FUJIWARA TAKESHI
分类号 G01N27/00;G01R31/26;H01L21/66 主分类号 G01N27/00
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