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发明名称
PLANARIZED TRENCH AND FIELD OXIDE ISOLATION SCHEME
摘要
申请公布号
EP0698284(A1)
申请公布日期
1996.02.28
申请号
EP19950911996
申请日期
1995.02.27
申请人
NATIONAL SEMICONDUCTOR CORPORATION
发明人
BASHIR, RASHID;HEBERT, FRANCOIS;CHEN, DATONG
分类号
H01L21/762;(IPC1-7):H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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