Micro-displacement type information detection probe device and microscope and information processing device by use thereof

摘要

A micro-displacement type information detection probe device capable of following all of the undulation on the mu m order, etc. and the periodical surface unevenness on the nm order, etc. of the recording medium or the substrate in performing recording, reproduction, etc. by use of tunnel current, etc. is provided. By forming a cantilever 701 of the first stage by extending the insulation layer laminated on the substrate, providing a layer structure 708 - 710 having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever 702 of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe 703 at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever 701 of the above first stage is displaced. <IMAGE>