| 摘要 |
To detect a variation of capacitance in a path of a piping and enable to decide a fluid state of a fluid substance flowing through the path in the piping, a capacitance sensor (15) includes a measuring electrode (33) and a grounding electrode (35) made of a conductive metallic film and wound around a path in the piping (1), with an insulator (17) in between. A shield member (23) covers the measuring electrode and grounding electrode, with an insulator in between. The grounding electrode is narrower than the measuring electrode, and the measuring electrode and the grounding electrode are alternately disposed and are wound to be spiral along a flow direction.
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