| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To rapidly measure the quantity distribution of the water film present on the surface of a base material on-line in a non-contact state. <P>SOLUTION: This measuring instrument is equipped with a light irradiation part equipped with an infrared ray source for emitting infrared rays of a wavelength region containing the absorbing wavelength and non-absorbing wavelength of water and an irradiation system for irradiating a predetermined region of the surface of the base material, which has a film of an aqueous solution present on its surface, with infrared rays emitted from the infrared ray source, a light detecting part equipped with a light detecting system permitting the light reflected from the surface of the base material to pass through a filter which permits the transmission of the absorbing wavelength of water and a filter which permits the transmission of the non-absorbing wavelength of water to guide it to a detector comprising a unidimensional or more multi-element type detector, a control system for alternately introducing the infrared rays, which pass through the filter which permits the transmission of the absorbing wavelength of water and the infrared rays, which pass through the filter which permits the transmission of the non-absorbing wavelength of water, into the detector and a signal processing system for calculating the absorbance of water from the light intensity of the filter permitting the transmission of the absorbing wavelength of water and the light intensity of the filter permitting the transmission of the non-absorbing wavelength of water. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
