| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp having a double tube structure comprising an outer tube and an inner tube, having sufficiently high reliability, and capable of surely preventing damage not only in carrying or mounting the lamp, but also in repeatedly lighting and extinguishing the lamp. SOLUTION: This excimer lamp is provided with a support member in a discharge vessel having the outer tube and the inner tube with at least axial one-side ends thereof welded to each other. The excimer lamp is characterized in that the support member has an outer ring part, an inner ring part, and connection parts connecting them to each other; and, when a virtual circle is formed at the middle position between the outer periphery of the outer ring part and the inner periphery of the inner ring part by using the center of the support member as a virtual center point, the circumferential length of a circular arc of the virtual circle on each connection part is not greater than 0.2 with respect to the entire circumference of the virtual circle, and the total of the circumferential lengths of the circular arcs on the connection parts is not greater than 0.4 with respect to the total circumference of the virtual circle. COPYRIGHT: (C)2008,JPO&INPIT
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