Molecular layer deposition using reduction process

摘要

A material is deposited onto a substrate by exposing the substrate to a metal-containing precursor to adsorb metal atoms of the metal-containing precursor to the substrate. The substrate injected with the metal-containing precursor is exposed to an organic precursor to deposit a layer of material by a reaction of the organic precursor with the metal atoms adsorbed to the substrate. The substrate is exposed to radicals of a reducing agent to increase reactivity of the material deposited on the substrate. The radicals of the reducing agent are produced by applying a voltage differential with electrodes to a gas such as hydrogen. The substrate may be exposed to radicals before and/or after exposing the substrate to the organic precursor. The substrate may be sequentially exposed to two or more different organic precursors. The material deposited on the substrate may be a metalcone such as Alucone, Zincone, Zircone, Titanicone, or Nickelcone.

主权项

1. A method for depositing material onto a substrate, the method comprising:
(a) exposing the substrate to a metal-containing precursor to adsorb metal atoms of the metal-containing precursor to the substrate; (b) exposing the substrate injected with the metal-containing precursor to an organic precursor to deposit a layer of material by a reaction of the organic precursor with the metal atoms adsorbed to the substrate; and (c) exposing the substrate to radicals of a reducing agent to increase reactivity of the material deposited on the substrate.