发明名称 FLUID HEATER
摘要 The present invention relates to a fluid heater (23) which is easily miniaturized, can be manufactured with low costs, obtains stable heating performance, and heats a fluid by a heater (232). The fluid heater comprises: a heating block (231) which is provided with an inner flow passage (231R) having an inlet (231a) for introducing the fluid and an outlet (231b) for discharging the fluid, and a heater insertion portion (231H) extending in a predetermined axial direction, wherein the inner flow passage (231R) includes a plurality of main flow passage portions (231R1) which extend in the predetermined axial direction and one or a plurality of connection flow passage portions (231R2) connected to the main flow passage portions (231R1).
申请公布号 KR20160076431(A) 申请公布日期 2016.06.30
申请号 KR20150165661 申请日期 2015.11.25
申请人 HORIBA STEC, CO., LTD. 发明人 TAGUCHI AKIHIRO;HAMADA MASASHI;YADA HIDETAKA
分类号 H01L21/324;H01L21/67 主分类号 H01L21/324
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