发明名称 |
FIDUCIAL DESIGN FOR TILTED OR GLANCING MILL OPERATIONS WITH A CHARGED PARTICLE BEAM |
摘要 |
A method for analyzing a sample with a charged particle beam including directing the beam toward the sample surface; milling the surface to expose a second surface in the sample in which the end of the second surface distal to ion source is milled to a greater depth relative to a reference depth than the end of the first surface proximal to ion source; directing the charged particle beam toward the second surface to form one or more images of the second surface; forming images of the cross sections of the multiple adjacent features of interest by detecting the interaction of the electron beam with the second surface; assembling the images of the cross section into a three-dimensional model of one or more of the features of interest. A method for forming an improved fiducial and determining the depth of an exposed feature in a nanoscale three-dimensional structure is presented. |
申请公布号 |
EP2939254(A4) |
申请公布日期 |
2016.09.07 |
申请号 |
EP20130867985 |
申请日期 |
2013.12.30 |
申请人 |
FEI COMPANY |
发明人 |
STONE, STACEY;LEE, SANG HOON;BLACKWOOD, JEFFREY;SCHMIDT, MICHAEL;KIM, HYUN HWA |
分类号 |
H01J37/317 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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