METHOD AND DEVICE FOR EXAMINATION OF A SAMPLE

摘要

The invention relates to a method for examining a sample, in which method the sample is illuminated in an illumination plane along an illumination strip by means of an illuminating light beam which widens along the illumination strip, and in which the illumination strip is projected into a detection plane by detection light originating from the illumination strip being focused in the detection plane, and in which the detection light is detected by a detector. The method is characterized in that the detector is a slit detector, and the direction of the slit width of the slit detector is oriented at an angle different from zero degrees with respect to the direction of the longitudinal extent of the image of the illumination strip in the detection plane. The invention further relates to a device for carrying out this type of method.