发明名称 |
Discharge ionization current detector and method for aging treatment of the same |
摘要 |
An aging treatment is performed by using cleaning gas obtained by mixing inert gas, as an impurity, to plasma gas. Plasma generation by dielectric-barrier discharge is performed until a predetermined period of time has elapsed by applying high AC voltage to an electrode while supplying the cleaning gas to a dielectric tube from a gas inlet. |
申请公布号 |
US9513257(B2) |
申请公布日期 |
2016.12.06 |
申请号 |
US201214382600 |
申请日期 |
2012.03.15 |
申请人 |
SHIMADZU CORPORATION |
发明人 |
Horiike Shigeyoshi;Shinada Kei;Nishimoto Takahiro |
分类号 |
G01N27/62;G01N27/68;G01N27/70;G01N30/64 |
主分类号 |
G01N27/62 |
代理机构 |
Westerman, Hattori, Daniels & Adrian, LLP |
代理人 |
Westerman, Hattori, Daniels & Adrian, LLP |
主权项 |
1. A method for aging treatment of a discharge ionization current detector including: a plasma generation section that is configured of a dielectric tube and a plurality of electrodes attached on an outer circumference of the dielectric tube, the plasma generation section continuously generating dielectric-barrier discharge inside the dielectric tube by applying high AC voltage to the electrodes while causing plasma gas to flow through the dielectric tube; a sample ionization section that is connected to a downstream end of the dielectric tube and that ionizes components in sample gas by light at a time of discharge generation at the plasma generation section; and an ion detection section that detects a sample component ionized by the sample ionization section, the method comprising:
supplying, as cleaning gas, mixed gas obtained by mixing inert gas with greater atomic weight than the plasma gas in the plasma gas, to the dielectric tube; and continuously generating the dielectric-barrier discharge over a predetermined period of time by the plasma generation section while supplying the cleaning gas. |
地址 |
Kyoto-shi JP |