APPARATUS AND METHOD FOR TRANSFERRING WAFER OF SOLAR BATTERY

摘要

PURPOSE: A transfer apparatus of a wafer for a solar battery and transfer method automatically advance a wafer transfer task between boat and carrier. The tact time is reduced and the productivity can be improved. CONSTITUTION: A carrier loading unit(200) loads the carrier. The boat is loaded while preparing in the around the boat loading unit(300). The wafer transfer unit(400) is composed the carrier loading unit and boat loading unit liver in order to mobile. In the wafer transfer unit is the carrier a plurality of wafer for the solar batteries, it transfers to boat or it transfers in boat to the carrier. The device body(500) supports the carrier loading unit, and the boat loading unit and wafer transfer unit.