Micromechanic acceleration switch

摘要

The switch forms a deceleration sensing system in combination with a deceleration sensor. It consists of at least one FET transistor (7) with gates influenced by an electric field consisting of electric charges on a charge carrier (6). The charge carrier is spring suspended (4). The switching state of the FETs is altered by a deflection of the charge carrier resulting from a deceleration above a defined threshold. The charge carrier and its suspension are made by a micro-mechanical technique.