TRAY FOR CONVEYING BASE PLATE

摘要

PROBLEM TO BE SOLVED: To provide a tray for conveying a base plate capable of stably and surely conveying the large-sized thin base plate without damaging the plate and preventing a contamination of the plate with particles or the like. SOLUTION: The tray 20 for conveying the base plate comprises a placing surface 102 for placing the base plate 14, and a base plate positional deviation preventing part 104 formed on a periphery of the surface 102. Thus, the plate can be surely contained and conveyed. The tray also comprises through holes 106 each to be inserted from below with a lift pin 152 for lifting the plate placed on the placing surface and formed thereon, and covers 108 each mounted on the hole to close the hole and raised by the pin. Since the holes are closed with the covers, a contamination of the plate via the holes is prevented.