发明名称 METHOD FOR MANUFACTURING STAMPER AND METHOD FOR MANUFACTURING OPTICAL RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper and an optical recording medium by which a stamper and an optical recording medium having pits having a good form can be obtained. SOLUTION: In the exposure process, a substrate on which a photoresist layer is formed is held between a transparent substrate disposed in the photoresist layer side and a turntable, and the photoresist layer is exposed to laser light through the transparent substrate.
申请公布号 JP2001325753(A) 申请公布日期 2001.11.22
申请号 JP20000141556 申请日期 2000.05.15
申请人 NIPPON COLUMBIA CO LTD 发明人 NAKANO KAZUHIKO
分类号 G03F7/40;G03F7/20;G03F7/42;G11B7/26;(IPC1-7):G11B7/26 主分类号 G03F7/40
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