| 摘要 |
A carrier head (100) that has a base assembly (104) and a flexible membrane (140). The flexible membrane has a generally circular main portion (142) with a lower surface (144) that provides a substrate-mounting surface and a plurality of concentric annular portions (150, 152, 154, 156, 158) extending from the main portion and secured to the base assembly. The volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers (160, 162, 164, 166, 168). The inner annular portion (150, 152, 154, 156) may include or a notch (200), or a widened section (230), adjacentajuncture between the inner annular portions and the main portion (142). |
