CARRIER BOX FOR TRANSFERRING WAFER TO EASILY TAKE OUT CARRIER INCLUDING PLURAL WAFERS

摘要

PURPOSE: A carrier box for transferring a wafer is provided to easily take out the carrier including a plurality of wafers by preventing the carrier from colliding with a carrier box in mounting or taking out the carrier and avoid contamination of a wafer caused by dropped particles. CONSTITUTION: A wafer mounting carrier(20) is horizontally mounted or taken out through the open front surface of a box body(22). A door(24) is connected to the open front surface of the box body to selectively open/shut the box body. A guide part(30a,30b) guides the sliding position of the carrier when the door is opened, formed in the bottom of the box body. A fixing part(32) selectively maintains the shut state of the door with respect to the box body, installed in the periphery of the edge of the open portion of the box body.