| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical liquid-spraying device capable of reliably preventing a high-voltage leakage and continuously and preferably spraying a chemical liquid. SOLUTION: The chemical liquid-spraying device 10 comprises a spraying nozzle 12 attached to a tip end part of a chemical liquid supply pipe 16 and a circular electrode 22 attached to the spraying nozzle 12 and positioned in front of the spraying nozzle 12 through a holder 20 made of an insulating material and chemical liquid-spraying device 10 sprays a chemical liquid by the spraying nozzle 12 and electrically charges the droplets of the chemical liquid passing through the circular electrode 22 by applying high voltage to the circular electrode 22 from a high-voltage generation apparatus 40. A cover 38 for covering a holder 20 so as to avoid a deposition of droplets to the holder 20 is installed in the holder 20. COPYRIGHT: (C)2007,JPO&INPIT
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