发明名称 |
FABRICATION METHOD OF WAFER-LEVEL FLIP CHIP PACKAGE USING ACF/NCF SOLUTION |
摘要 |
A method for fabricating a wafer-level flip-chip package using an ACF/NCA solution is provided to effective suppress shadow effect by directly coating a material of a solution stage having a composition of an ACA(anisotropic conductive adhesive) film or NCA(non-conductive adhesive) film on a wafer. After a mixture solution including insulation polymer resin, a hardening agent and an organic solvent is deposited on a wafer(100) with a non-solder bump(113), the deposited mixture solution(115) is dried to transform the mixture deposited on the wafer into a B-stage. The dried wafer is diced into individual chips. After the diced semiconductor chips(200) are aligned with an electrode of a substrate(300), heat and pressure is applied to perform a flip-chip bonding process. The mixture solution can include a conductive particle having 5~20 weight percent with respect to the insulation polymer resin. |
申请公布号 |
KR100821962(B1) |
申请公布日期 |
2008.04.15 |
申请号 |
KR20070059918 |
申请日期 |
2007.06.19 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
PAIK, KYUNG WOOK;JANG, KYUNG WOON;KIM, IL |
分类号 |
H01L21/60;H01L23/48 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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地址 |
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