| 摘要 |
To improve position reproducibility of support pins 3 and to prevent a displacement of a substrate in a horizontal direction during movement of a position of the substrate between a position on a mounting board 2 and a position on the support pins 3. [Means for Settlement] A substrate measuring stage 1 used for a curve measuring system 7 measuring a curve of the substrate W and an ordinary measuring system 6 measuring each of or one of a physical quantity and a chemical quantity of the substrate W other than the curve, includes the mounting board 2 movable between an ordinary measurement position P1 for the ordinary measuring system 6 and a retreat position P2 away from and downward of the ordinary measurement position P1; the plurality of support pins 3 insertable into through-holes 21 provided in the mounting board 2 and fixed to a curve measurement position P3 for the curve measuring system 7; and a drive mechanism vertically moving the mounting board 2 between the ordinary measurement position P1 and the retreat position P2. The curve measurement position P3 is set between the ordinary measurement position P1 and the retreat position P2. [Selected Drawing]
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