MEMS component for generating pressure pulses

摘要

A MEMS component for generating pressure pulses is provided, its micromechanical structure including at least three function levels: a first function level in which at least one stationary trench structure is implemented, a second function level, which is implemented above the first function level and includes at least one triggerable displacement element as well as through-openings as pressure outlet openings, the displacement element protruding into the trench structure and being movable in parallel with the function levels, whereby positive and negative pressure pulses are generated, and a third function level, which is implemented above the second function level and includes at least one triggerable cover element for at least one part of the pressure outlet openings in the second function level.

主权项

1. A MEMS component for generating pressure pulses, comprising:
a micromechanical structure including at least three function levels, wherein:
a first function level includes at least one stationary trench structure,a second function level is implemented above the first function level and includes at least one triggerable displacement element and through-openings as pressure outlet openings, the displacement element protruding into the trench structure and being movable in parallel with the function levels, whereby positive and negative pressure pulses are generated, anda third function level is implemented above the second function level and includes at least one triggerable cover element for at least one part of the pressure outlet openings in the second function level; and a trigger arrangement, wherein the trigger arrangement and a suspension of the displacement element in the second function level permit one of a translatory movement and a rotatory movement in parallel to the function levels.