| 摘要 |
<p>A treating-gas supply system (2) which supplies a treating gas diluted with a diluent gas to a gas use system (4). The treating-gas supply system (2) comprises a treating-gas tank (10), a diluent gas tank (12), a main gas passage (14) connecting the treating-gas tank (10) to the gas use system (4), and a diluent gas passage connecting the diluent gas tank (12) to the main gas passage.The main gas passage (14) and the diluent gas passage have flow controllers (FC1), (FC2), and (FC5) disposed therein. The diluent gas passage is connected to that part of the main gas passage which is located immediately downstream from the flow controllers except the flow controller located on the most downstream side. The system further includes an excess gas discharge passage (24) for discharging any excess diluted treating gas, the passage (24) being connected to that part of the main gas passage which is located immediately upstream from the flow controllers except the flow controller located on the most upstream side.</p> |
