APPARATUS FOR GENERATING DIELECTRIC BARRIER DISCHARGE GAS

摘要

Disclosed is an apparatus for generating a dielectric barrier discharge gas, which enables to take out a high-energy radical gas at high density with high efficiency and supply the gas to an object to be processed. Specifically in this apparatus, plate-like first electrode and second electrode are arranged opposite to each other and a dielectric body is arranged between the electrodes. A discharge space is formed between the first electrode and the dielectric body, and three sides of the discharge space are gas-shielded and the remaining one side is opened to the end faces of the first electrode and the dielectric body. The apparatus for generating a dielectric barrier discharge gas further comprises a cooling unit for cooling at least the first electrode, and a gas supply unit for supplying a raw material gas into the discharge space. A dielectric barrier discharge is generated in the discharge space by applying an alternating voltage to the first electrode and the second electrode.