发明名称 |
Insulated dielectric window assembly of an inductively coupled plasma processing apparatus |
摘要 |
An insulated dielectric window assembly comprising a dielectric window of an inductively coupled plasma processing apparatus; an upper polymeric ring, and a lower polymeric ring. The upper polymeric ring insulates the outer edge of the dielectric window from a cooler ambient atmosphere and the lower polymeric ring insulates the lower surface of the dielectric window from a chamber surface supporting the window. |
申请公布号 |
US9437400(B2) |
申请公布日期 |
2016.09.06 |
申请号 |
US201213462305 |
申请日期 |
2012.05.02 |
申请人 |
Lam Research Corporation |
发明人 |
Setton David;Bhattacharyya Gautam;Richardson Brett C. |
分类号 |
C23C16/00;H01L21/326;H01J37/32 |
主分类号 |
C23C16/00 |
代理机构 |
Buchanan Ingersoll & Rooney PC |
代理人 |
Buchanan Ingersoll & Rooney PC |
主权项 |
1. An insulated dielectric window assembly for use as an upper wall of an inductively coupled plasma processing chamber in which semiconductor substrates can be processed, the insulated dielectric window assembly comprising:
a dielectric window including a central bore extending between upper and lower surfaces configured to receive a top gas injector and at least one blind bore in the upper surface configured to receive a temperature monitoring sensor; an upper polymeric ring of a thermally insulating material on an outer exposed section of the dielectric window, the upper polymeric ring including a cylindrical side wall and an annular upper wall extending radially inward from an upper end of the cylindrical side wall, the cylindrical side wall on a side surface of the dielectric window and the annular upper wall on an outer portion of the upper surface of the dielectric window so as to provide a thermal barrier from a surrounding ambient atmosphere; and a lower polymeric ring wherein a lower surface of the dielectric window is positioned on an upper surface of the lower polymeric ring so as to provide a thermal barrier between the dielectric window and a support surface of the plasma processing chamber. |
地址 |
Fremont CA US |