发明名称 CONDUCTIVE CAP FOR METAL-GATE TRANSISTOR
摘要 A semiconductor device includes a gate region, a conductive cap, and an interconnect. The gate region (e.g., a metal-gate transistor) includes a metal gate region and a high dielectric constant (high-K) gate dielectric region. The conductive cap is disposed on a surface of the metal gate region and on a surface of the high-K gate dielectric region, and the interconnect is disposed on the conductive cap. The conductive cap includes a conductive material that electrically connects the gate region to the interconnect.
申请公布号 US2016276455(A1) 申请公布日期 2016.09.22
申请号 US201514661953 申请日期 2015.03.18
申请人 QUALCOMM Incorporated 发明人 Yang Haining;Song Stanley Seungchul
分类号 H01L29/49;H01L29/06;H01L29/66;H01L21/28;H01L21/768;H01L21/3213;H01L23/528;H01L23/532;H01L29/51;H01L29/78 主分类号 H01L29/49
代理机构 代理人
主权项 1. A semiconductor device comprising: a gate region, wherein the gate region includes a metal gate region and a high dielectric constant (high-K) gate dielectric region; a conductive cap disposed on a surface of the metal gate region and on a surface of the high-K gate dielectric region; and an interconnect disposed on the conductive cap, wherein the conductive cap includes a conductive material to electrically connect the gate region to the interconnect.
地址 San Diego CA US