| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for reducing an off-set voltage of a force detector.SOLUTION: A force detector 1 includes mesa gauges 12, 14, 16, and 18 forming a full-bridge circuit. The mesa gauges 12, 14, 16, and 18 each extend in a direction <110> of a semiconductor substrate 2. A force transmitting block 4 is in contact with the first mesa gauge 12 and the fourth mesa gauge 18 and is not in contact with the second mesa gauge 14 and the third mesa gauge 16.SELECTED DRAWING: Figure 1 |
