| 摘要 |
<p>PURPOSE: A substrate processing system including a monitoring device and a process monitoring method are provided to determine a normal operation state by including the monitoring device which compares the color of the substrate with the normal color. CONSTITUTION: A transfer device is positioned outside a process chamber and transfers the substrate through an outlet of the process chamber. A monitoring device(150) recognizes the color of the substrate and includes a camera and an image processor. The image processor determines whether the color of a substrate(190) is normal and includes a memory which stores the color of the substrate according to the process.</p> |
