发明名称 Method of manufacturing piezoelectric actuator
摘要 There is provided a method of manufacturing a piezoelectric actuator, which has high production efficiency and is available to miniaturize the piezoelectric actuator. Also, piezoelectric actuators are packed simply and a quality examination before shipment is performed easily. In this manufacturing method, various part sheets except for piezoelectric bodies of the piezoelectric actuators are joined to a piezoelectric material sheet having a size that a plurality of piezoelectric actuators can be formed, so as to from the plurality of piezoelectric actuators, and the piezoelectric material sheet is formed with a predetermined poling structure. Then, the piezoelectric material sheet is divided to manufacture the plurality of piezoelectric actuators. Also, dividing of the piezoelectric material sheet may be performed in a place where the piezoelectric actuator is to be used. <IMAGE>
申请公布号 EP1132979(A2) 申请公布日期 2001.09.12
申请号 EP20010302167 申请日期 2001.03.09
申请人 SEIKO INSTRUMENTS INC. 发明人 SUZUKI, MAKOTO;KASUGA, MASAO;IINO, AKIHIRO;KOROISHI, KEITAROU
分类号 H01L41/09;H01L41/22;H01L41/338;H02N2/00 主分类号 H01L41/09
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