MOVING APPARATUS AND ELECTRONIC COMPONENT TESTING APPARATUS

摘要

An air cylinder (123) vertically moves a suction head (303e) for sucking and holding an IC device in an electronic component testing apparatus. The air cylinder is provided with a cylinder tube (123a); a piston (123c); a first hollow chamber (123d) formed below the piston (123c); a second hollow chamber (123f) formed above the piston (123c) and has a larger pressure receiving area of the piston (123c) than that in the first hollow chamber (123d); and a rod (123h) whose one end is connected to the piston (123c) and the other end is connected to a suction head (303e). The first hollow chamber (123d) is connected to an air supply apparatus through a first supply system which ensures air supply even when a power supply of the electronic component testing apparatus is interrupted. The second hollow chamber (123f) is connected to the air supply apparatus through a second supply system having a shut-off valve.