发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a plurality of nonvolatile memory cells (1). Each of the nonvolatile memory cells comprises a MOS type first transistor section (3) used for information storage, and a MOS type second transistor section (4) which selects the first transistor section. The second transistor section has a bit line electrode (16) connected to a bit line, and a control gate electrode (18) connected to a control gate control line. The first transistor section has a source line electrode (10) connected to a source line, a memory gate electrode (14) connected to a memory gate control line, and a charge storage region (11) disposed directly below the memory gate electrode. A gate withstand voltage of the second transistor section is lower than that of the first transistor section. Assuming that the thickness of a gate insulating film of the second transistor section is defined as tc and the thickness of a gate insulating film of the first transistor section is defined as tm, they have a relationship of tc<tm.
申请公布号 US2009010072(A1) 申请公布日期 2009.01.08
申请号 US20080142566 申请日期 2008.06.19
申请人 HITACHI ULSI SYSTEMS CO., LTD. 发明人 TANAKA TOSHIHIRO;UMEMOTO YUKIKO;HIRAKI MITSURU;SHINAGAWA YUTAKA;FUJITO MASAMICHI;SUZUKAWA KAZUFUMI;TANIKAWA HIROYUKI;YAMAKI TAKASHI;KAMIGAKI YOSHIAKI;MINAMI SHINICHI;KATAYAMA KOZO;MATSUZAKI NOZOMU
分类号 G11C11/34;G11C16/04;H01L21/28;H01L21/336;H01L21/8247;H01L27/105;H01L27/115;H01L29/423;H01L29/78;H01L29/788;H01L29/792 主分类号 G11C11/34
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