发明名称 |
SUBSTRATE HANDLING SYSTEM |
摘要 |
A substrate handling system and method in which an air chuck produces a film of air between the substrate and the air chuck, a magnetic chuck attracts the substrate to the air chuck, and an actuator subsystem moves the magnetic chuck closer to and away from the air chuck to alternately pick up a substrate and release the substrate. |
申请公布号 |
EP1628807(A4) |
申请公布日期 |
2009.06.17 |
申请号 |
EP20040753909 |
申请日期 |
2004.05.28 |
申请人 |
PERKINELMER, INC. |
发明人 |
SHAVER, NORMAN, L.;ELLIS, TIMOTHY, A.;HILL, DAVID, R. |
分类号 |
B65H3/16;B25J;B41C1/00;B41C1/05;B65H5/04;C23C16/00 |
主分类号 |
B65H3/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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