| 摘要 |
PROBLEM TO BE SOLVED: To simplify a system by achieving a driving of an X-axis stage, a Y-axis stage, a Z-axis stage, and a θ-axis stage of a stage constructing scanning means by a common controller and a driver in a scanning electron microscope that obtains an image on a surface of a sample by radiating an electronic beam to the sample while relatively scanning.SOLUTION: A control of an ultrasonic motor, for driving an X-axis stage 45 and a Y-axis stage 46 for relatively moving a sample to an electronic beam and scanning performs a whole control of each axis of the ultrasonic motor by using a driver 61 controlled by a CPU 60. A changeover switch 62 is arranged between the driver 61 and each axis of ultrasonic motor, and the changeover switch 62 is switched corresponding to a switching command from the CPU 60.SELECTED DRAWING: Figure 4 |
