| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gate device of a treatment liquid tank, which can keep its sealability high for a long period of time, simplifies its driving mechanism, and can prevent the degradation of the function of the driving mechanism due to the treatment liquid. <P>SOLUTION: The gate device includes a movable gate member 93 which opens and closes a workpiece-passing port 88 that can pass a tabular workpiece, and the driving mechanism 94 which moves the movable gate member 93 so that the movable gate member can change its position between a closed position for closing the workpiece-passing port 88 and an opened position for opening the workpiece-passing port 88. The driving mechanism 94 includes a slide part 93a which moves in an integrated manner with the movable gate member 93, and a pair of tube members 101 and 102 which are arranged in both sides in a moving direction of the slide part 93a and can expand and shrink; and moves the movable gate member 93 to the opened position by expanding one tube member 101 and shrinking the other tube member 102, and moves the movable gate member 93 to the closed position by shrinking one tube member 101 and expanding the other tube member 102. <P>COPYRIGHT: (C)2010,JPO&INPIT |
