| 摘要 |
PROBLEM TO BE SOLVED: To provide inspection equipment which can inspect a machining state during laser beam machining simultaneously with machining by inspecting the machining state on real time, a laser beam machining apparatus, and a laser beam machining inspection method.SOLUTION: Inspection equipment 30A that inspects a machining state of a workpiece m to be machined by a laser beam 20A comprises a measurement unit 31A that measures an amount of light emitted from the workpiece m during laser beam machining and a judgment unit 32A that judges a machining state of the workpiece m from an amount of light measured by the measurement unit 31A, where the judgment unit 32A compares a preset reference light amount with a measured light amount measured by the measurement unit 31A to judge the machining amount of the workpiece m.SELECTED DRAWING: Figure 1 |
