发明名称 |
Perforated contact electrode on vertical nanowire array |
摘要 |
Disclosed herein is a structure having: a support, a plurality of nanowires perpendicular to the support, and an electrode in contact with a first end of each nanowire. Each nanowire has a second end in contact with the support. The electrode contains a plurality of perforations. The electrode contains a plurality of perforations. Also disclosed herein is a method of: providing the above support and nanowires; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire; wherein the electrode contains a plurality of perforations. |
申请公布号 |
US9422158(B2) |
申请公布日期 |
2016.08.23 |
申请号 |
US201113293323 |
申请日期 |
2011.11.10 |
申请人 |
The United States of Amerixa, as represented by the Secretary of the Navy |
发明人 |
Pehrsson Pehr E;Field Chistopher;In Hyun Jin |
分类号 |
H01L31/00;G01F25/00;B82Y10/00;B82Y15/00;B82Y30/00;B82Y40/00;H01L29/06;G01N27/12;G01R1/067 |
主分类号 |
H01L31/00 |
代理机构 |
US Naval Research Laboratory |
代理人 |
US Naval Research Laboratory ;Grunkemeyer Joseph T. |
主权项 |
1. A method comprising:
providing a structure comprising:
a support; anda plurality of nanowires perpendicular to the support, each nanowire having a second end in contact with the support; depositing a layer of a filler material that covers a portion of each nanowire and leaves a first end of each nanowire exposed; depositing a plurality of nanoparticles onto the filler material; depositing an electrode material on the nanoparticles, the ends of the nanowires, and any exposed filler material; and removing the nanoparticles and filler material to form an electrode in contact with the first end of each nanowire;
wherein the electrode contains a plurality of perforations. |
地址 |
Washington DC US |