PROBENSTEG MIT FLEXIBLEM MECHANISMUSMODUL ZUR AUFNAHME DER GLEITDEFORMATION

摘要

A sample traveling stage with flexure mechanism module is provided to reduce the deformation error of a mirror including a sample table and a sample by not delivering the deformation of a slide to the sample table. In a sample traveling stage with flexure mechanism module, a moving unit mounted on a base frame(10) includes a first slide(20) moving along with a first guide block(21) and a second slide (30) which is mounted on the first slide and moves along with a second guide block(32). A moving unit transfers a sample(41) using the sample table(40) mounted on the second slide and measures a displacement through X,Y bar mirrors (42,43) which are mounted vertically with each other on the sample table. A measuring unit receives an interference signal of the beam reflected with X, Y bar mirror through a receiver and outputs a displacement signal. A flexure mechanism includes a plurality of buffering holes, a loader and the deformation lines.