Microelectromechanical systems (MEMS) microphone having two back cavities separated by a tuning port

摘要

Microelectromechanical systems (MEMS) microphones associated with a tunable back cavity are described. Provided implementations can comprise a MEMS acoustic sensor element associated with a first back cavity, which first back cavity can be separated and/or acoustically coupled by a tuning port to a second back cavity. In addition, various physical and acoustic filtering configurations of MEMS microphones and tunable back cavities are described.

主权项

1. A device, comprising:
a first package comprising a microelectromechanical systems (MEMS) acoustic sensor element associated with a first back cavity, wherein the MEMS acoustic sensor element comprises a diaphragm and a stationary electrode, and wherein the first back cavity comprises an enclosure situated between the MEMS acoustic sensor element and a second back cavity; a second package comprising a lid and a package substrate, wherein the package substrate has a port adapted to receive acoustic waves, wherein the second package comprises the second back cavity formed by the lid and the package substrate, and wherein the second package houses the MEMS acoustic sensor element; and a tuning port comprising at least opening in the enclosure, configured to restrict an airflow between the first back cavity and the second back cavity in response to an acoustic impulse, and that acoustically couples the first and second back cavities, wherein the MEMS acoustic sensor element is configured to operate at a predetermined resonance frequency.