Fabrication and self-aligned local functionalization of nanocups and various plasmonic nanostructures on flexible substrates for implantable and sensing applications

摘要

Methods for fabricating flexible substrate nanostructured devices are disclosed. The nanostructures comprise nano-pillars and metallic bulbs or nano-apertures. The nanostructures can be functionalized to detect biological entities. The flexible substrates can be rolled into cylindrical tubes for detection of fluidic samples.

主权项

1. A method comprising:
etching a silicon substrate to form silicon nanostructures on top of the silicon substrate; oxidizing the silicon nanostructures to form silicon oxide nanostructures; depositing a metallic layer on the silicon oxide nanostructures; reflowing the metallic layer to form metallic bulbs on a top section of the silicon oxide nanostructures; depositing a continuous flexible substrate on the metallic bulbs and on the silicon oxide nanostructures; and removing the silicon substrate and the silicon oxide nanostructures.