| 发明名称 |
MICROSAMPLE STAGE AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
Disclosed herein is a microsample stage that can be formed through an automatic manufacturing process. The microsample stage includes a base, a microsample-fixing portion that is formed on the base and to which a microsample is fixed, and multiple alignment marks. |
| 申请公布号 |
US2016372301(A1) |
申请公布日期 |
2016.12.22 |
| 申请号 |
US201615181702 |
申请日期 |
2016.06.14 |
| 申请人 |
HITACHI HIGH-TECH SCIENCE CORPORATION |
发明人 |
ASAHATA Tatsuya;MORI Akito;YUZURIHA Asumi |
| 分类号 |
H01J37/20;H01J37/28 |
主分类号 |
H01J37/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microsample stage comprising:
a base; a microsample-fixing portion formed on an upper surface of the base; and an alignment mark. |
| 地址 |
Tokyo JP |
