| 发明名称 |
DIRECTED SELF-ASSEMBLY |
| 摘要 |
The disclosure provides methods for directed self-assembly (DSA) of a block co-polymer (BCP). In one embodiment, a method includes: forming an oxide spacer along each of a first sidewall and a second sidewall of a cavity in a semiconductor substrate; forming a neutral layer between the oxide spacers and along a bottom of the cavity; and removing the oxide spacers to expose the first and second sidewalls and a portion of the bottom of the cavity adjacent the first and second sidewalls. |
| 申请公布号 |
US2016379837(A1) |
申请公布日期 |
2016.12.29 |
| 申请号 |
US201514754664 |
申请日期 |
2015.06.29 |
| 申请人 |
International Business Machines Corporation |
发明人 |
Cheng Joy;Guillorn Michael A.;Liu Chi-Chun;Pitera Jed W.;Tsai Hsinyu |
| 分类号 |
H01L21/308;H01L21/3105;C09D201/00;H01L21/02 |
主分类号 |
H01L21/308 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
forming an oxide spacer along each of a first sidewall and a second sidewall of a cavity in a semiconductor substrate; forming a neutral layer between the oxide spacers and along a bottom of the cavity; and removing the oxide spacers to expose the first and second sidewalls and a portion of the bottom of the cavity adjacent the first and second sidewalls. |
| 地址 |
Armonk NY US |
