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发明名称
Verfahren zum lokalen Entfernen einer UV-transparenten Isolationsschicht auf einem Halbleitersubstrat
摘要
申请公布号
DE4203805(C2)
申请公布日期
1994.02.10
申请号
DE19924203805
申请日期
1992.02.10
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
BURMER, CHRISTIAN, 8201 ROHRDORF, DE
分类号
H01L21/3105;H01L21/768;(IPC1-7):H01L21/310;B23K26/00;H01L21/285
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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