发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To prevent reliability in connection between the electrode pad of a wiring board and the bump electrode of a semiconductor chip from being deteriorated due to voids remaining between the wiring board and the semiconductor chip. SOLUTION: A semiconductor chip 2 in which plural bump electrodes 4 are arranged on the circuit face in an array, extended from the central part to the surrounding part is prepared. Then, sheet-shaped adhesive 5 made of thermosetting resin is adhered to one surface of the wiring board 1. Afterwards, the semiconductor chip 2 is placed through the adhesive 5 on one surface of the wiring board 1 with the circuit face of the semiconductor chip 2 facing the surface of the wiring board. Then, the semiconductor chip 2 is pressed while being heated, and the bump electrode 4 of the semiconductor chip 2 is pressure-welded to an electrode pad 1A of the wiring board 1.
申请公布号 JPH1131716(A) 申请公布日期 1999.02.02
申请号 JP19970186161 申请日期 1997.07.11
申请人 HITACHI LTD 发明人 KIKUCHI TAKU;IMASU SEISHI;YOSHIDA IKUO
分类号 H01L21/60;H01L21/52;H01L21/603 主分类号 H01L21/60
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