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发明名称
MEASUREMENT PATTERN OF LENS ABERRATION AND MEASURING METHOD
摘要
申请公布号
JPH1144609(A)
申请公布日期
1999.02.16
申请号
JP19970202731
申请日期
1997.07.29
申请人
MATSUSHITA ELECTRON CORP
发明人
SAITO TAKU
分类号
G01M11/00;G01M11/02;(IPC1-7):G01M11/02
主分类号
G01M11/00
代理机构
代理人
主权项
地址
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