发明名称 |
Detecting agent and detection method for a gas containing metal compound |
摘要 |
A detecting agent for gas containing a metal compound comprises pyridylazo compound as a color transition component supported on a carrier. A detection method for detecting a metal compound contained in a gas comprises steps of bringing the gas containing the metal compound into contact with a detecting agent comprising pyridylazo compound as a color transition component supported on a carrier; and detecting a color transition of the detecting agent. According to the present invention, a sensitive detecting agent or a sensitive detection method enables to detect metal compounds contained in a gas exhausted from semiconductor manufacturing process, etc., without affected by accompanying gas like ammonia.
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申请公布号 |
US2004185571(A1) |
申请公布日期 |
2004.09.23 |
申请号 |
US20040804103 |
申请日期 |
2004.03.19 |
申请人 |
OTSUKA KENJI;NAWA YOUJI;TAYAMA TATSUNORI |
发明人 |
OTSUKA KENJI;NAWA YOUJI;TAYAMA TATSUNORI |
分类号 |
G01N31/00;G01N21/77;G01N21/78;G01N31/22;(IPC1-7):G01N31/22 |
主分类号 |
G01N31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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