发明名称 Detecting agent and detection method for a gas containing metal compound
摘要 A detecting agent for gas containing a metal compound comprises pyridylazo compound as a color transition component supported on a carrier. A detection method for detecting a metal compound contained in a gas comprises steps of bringing the gas containing the metal compound into contact with a detecting agent comprising pyridylazo compound as a color transition component supported on a carrier; and detecting a color transition of the detecting agent. According to the present invention, a sensitive detecting agent or a sensitive detection method enables to detect metal compounds contained in a gas exhausted from semiconductor manufacturing process, etc., without affected by accompanying gas like ammonia.
申请公布号 US2004185571(A1) 申请公布日期 2004.09.23
申请号 US20040804103 申请日期 2004.03.19
申请人 OTSUKA KENJI;NAWA YOUJI;TAYAMA TATSUNORI 发明人 OTSUKA KENJI;NAWA YOUJI;TAYAMA TATSUNORI
分类号 G01N31/00;G01N21/77;G01N21/78;G01N31/22;(IPC1-7):G01N31/22 主分类号 G01N31/00
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