| 摘要 |
A vaporizer where a reaction tube can have a long path and where vaporization is thoroughly promoted by radiant heat from a heater. The promotion of the vaporization occurs when a carrier gas where a source material solution is dispersed is agitated in the direction crossing the passing direction of the gas, the agitation being made by a centrifugal force produced when the gas passes through the reaction tube. A carrier gas in which a solution of a liquid or powder source material is dispersed is supplied from the upstream side to a spiral reaction tube (103), and the carrier gas, where the source material solution is dispersed, passes through in the reaction tube (103) is vaporized by radiant heat from a heater (104).
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