ETCHING LIQUID, REFILLING LIQUID, AND FORMING METHOD OF CONDUCTOR PATTERN USING IT

摘要

PROBLEM TO BE SOLVED: To provide an etching liquid and refilling liquid which can promptly etch at least one metal chosen from Ni, Cr, Ni-Cr alloy, and Pd, and a forming method of conductor pattern using it. SOLUTION: The etching liquid or a solution of water, which contains at least one component chosen from NO, N2O, NO2, N2O3and these ions, and an acid component, etches at least one metal chosen from Ni, Cr, Ni-Cr ally and Pd. The forming method of a conductor pattern (1) forms the conductor pattern (1) by etching at least one metal chosen from Ni, Cr, Ni-Cr alloy and Pd with the liquid. COPYRIGHT: (C)2006,JPO&NCIPI