PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD, INK JET RECORDING HEAD, AND INK JET PRINTER

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element ensuring good piezoelectric characteristics, and to provide its fabrication process.

SOLUTION: The method for manufacturing a piezoelectric element 10 comprises a step for forming a first electrode 4 above a substrate 1, a step for forming a piezoelectric layer 5 composed of a piezoelectric having a perovskite structure above the first electrode 4, and a step for forming a second electrode 6 above the piezoelectric layer 5, wherein the step for forming the first electrode 4 comprises a step for forming a nickel acid lanthanum layer 42 to orient toward a cubic (100) by sputtering wherein the ratio of nickel to lathanum (Ni/La) in a target being used in sputtering is in the range of 1-1.5.

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