| 摘要 |
An environmental system that controls an environment in a gap between an optical assembly and a device includes a fluid barrier, an immersion fluid system, an electro-osmotic element, and a control system. The fluid barrier is positioned near the device and maintains the electro-osmotic element near the gap. The immersion fluid system delivers an immersion fluid that fills the gap. The control system applies an electrical voltage to the electro-osmotic element that causes the electro-osmotic element to transport at least a portion of the immersion fluid that is near the fluid barrier and the device away from the device. The electro-osmotic element can be made of a porous material. |
