| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a locking mechanism for a stage apparatus capable of surely holding a stage plate that is in a non-active state in a prescribed position. <P>SOLUTION: The locking mechanism for the stage apparatus includes a pair of engagement members 90 and 91 protrusively arranged on the stage plate; and a pair of arm members 140 and 141, which separately include engagement grooves 147, 148, 149 and 150 formed in both free ends thereof, and which are supported coaxially and pivotally by a common shaft 154. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
